[仿真]Determination of the electron energydistribution function in the plasma

Abstract SU#P.y18%  
A method is proposed to determine the electron energy distribution function Zm8 u:  
(EEDF), which is related to the second derivative of the electrostatic probe jO3u]5}.6  
characteristic by the Druyvesteyn theory. The method is based on the Y5A~iGp8E  
numerical simulation of the effect induced by a sinusoidal perturbation &"j).Ogm
4  
superimposed on to the dc voltage applied to the probe. This simulation M-qxD"VtV=  
generates a multiple harmonic components’ signal over the rough sh))[V"8  
experimental data. Each harmonic component can be isolated by means of }2!5#/^~  
finite impulse response filters. Then, the second derivative is deduced from @IyH(J],h  
the second harmonic component using the Taylor expansion. The efficiency {, *Y  
of the multiple harmonic simulation method is proved first on simple models Z\
gg<Q  
and second on a typical Langmuir probe characteristic recorded in a {+UNjKQC  
plasma-containing argon. This method is used to investigate expanding kO`3ENN
 
microwave plasma in the case of two different reactor configurations. 4M<JfD  
Keywords: Langmuir probe, e .. tm36Lw  
neY=:9  

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