[仿真]Determination of the electron energydistribution function in the plasma

Abstract 2i7i\?<.  
A method is proposed to determine the electron energy distribution function orB8Q\p'  
(EEDF), which is related to the second derivative of the electrostatic probe KCJN<  
characteristic by the Druyvesteyn theory. The method is based on the WBw M;S#%  
numerical simulation of the effect induced by a sinusoidal perturbation `j}_BW_  
superimposed on to the dc voltage applied to the probe. This simulation aucZJjH  
generates a multiple harmonic components’ signal over the rough }dd k}wga  
experimental data. Each harmonic component can be isolated by means of W) 33;E/}  
finite impulse response filters. Then, the second derivative is deduced from [j=,g-EOA  
the second harmonic component using the Taylor expansion. The efficiency 5U)ab3:  
of the multiple harmonic simulation method is proved first on simple models ?}=-eJ(7e  
and second on a typical Langmuir probe characteristic recorded in a ,XeyE;||  
plasma-containing argon. This method is used to investigate expanding ;Y@!:p-H  
microwave plasma in the case of two different reactor configurations. c>R`jb@$N  
Keywords: Langmuir probe, e .. +w k]iH  
MS st  

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