[仿真]Monte Carlo simulation of a microwave plasma in hydrogen

Abstract. Monte Carlo simulations of a microwave plasma (frequency 2.45 GHz, pressure AHT(Z~C  
2–15 kPa) in hydrogen are reported. The simulation follows the chaotic motion of a number OTEx9  
of electrons and ions under the influence of outer (microwave) and inner (other charge j'XND`3  
carriers) electric fields. The charge carriers collide with the neutral gas particles either in an )7m.n%B!5V  
elastic or inelastic manner. In such a simulation only basic physical laws have to be applied. #%]?e N  
The simulations produce reaction rates for the different reaction paths of main SbobXTbG  
importance in a straightforward way. The electron energy distribution function (EEDF), CX7eCo  
which is simply a time average of the actual energies of the electrons, deviates from the SwO8d;e  
Maxwell distribution by a depletion at low and high electron energies. Correction functions "/x/]Qx2  
are derived which allow EEDFs under widely different plasma conditions to be calculated !MOcF5M  
from the respective Maxwell distributions. Finally the results are a .. M2A3]wd2a  
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应该有个简短的说明

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