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[射频]RF MEMS and Their Applications(完整版)

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书籍名称: RF MEMS and Their Applications
书籍作者: Vijay K. Varadan, K.J. Vinoy
书籍语种: 英文
出版社: John Wiley & Sons Ltd
出版日期: April 2003
页码总数: 394
ISBN号: 0-470-84308-X
文件格式: PDF

内容简介: Product Description
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities.

Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors
Includes coverage of MEMS devices for wireless and Bluetooth enabled systems
Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.
From the Back Cover
The growing requirement for wireless devices with increased functionality and reduced power consumption is driving the development of new RF micro-electro-mechanical systems (RF MEMS).
RF MEMS and their Applications sets out to address an increasing need for information by providing a vital overview of this emerging field.

This book:

Presents an accessible review of MEMS devices and fabrication techniques.
Discusses the development of RF MEMS switches and the attempts to reduce their actuation voltage.
Outlines the design and development of RF MEMS based inductors, capacitors, filters and phase shifters.
Covers the technology behind micromachined antennas.
Describes integration and packaging techniques for RF MEMS devices.
Offering readers a guide to the development of RF MEMS components and systems, this unique reference will appeal to RF and microwave engineers and MEMS experts alike. Graduate students and researchers in the telecommunications and microelectronics field will profit from the detailed overview of current microfabrication techniques. Materials technologists and physicists working in industrial and academic research & development will also find this a valuable reference.
书籍目录: Contents
Preface xi
1 Microelectromechanical systems (MEMS) and radio frequency
MEMS 1
1.1 Introduction 1
1.2 MEMS 2
1.3 Microfabrications for MEMS 5
1.3.1 Bulk micromachining of silicon 5
1.3.2 Surface micromachining of silicon 8
1.3.3 Wafer bonding for MEMS 9
1.3.4 LIGA process 11
1.3.5 Micromachining of polymeric MEMS devices 13
1.3.6 Three-dimensional microfabrications 15
1.4 Electromechanical transducers 16
1.4.1 Piezoelectric transducers 18
1.4.2 Electrostrictive transducers 20
1.4.3 Magnetostrictive transducers 22
1.4.4 Electrostatic actuators 24
1.4.5 Electromagnetic transducers 27
1.4.6 Electrodynamic transducers 29
1.4.7 Electrothermal actuators 32
1.4.8 Comparison of electromechanical actuation schemes 34
1.5 Microsensing for MEMS 35
1.5.1 Piezoresistive sensing 35
1.5.2 Capacitive sensing 37
1.5.3 Piezoelectric sensing 37
1.5.4 Resonant sensing 38
1.5.5 Surface acoustic wave sensors 38
1.6 Materials for MEMS 42
1.6.1 Metal and metal alloys for MEMS 42
1.6.2 Polymers for MEMS 42
1.6.3 Other materials for MEMS 44
1.7 Scope of this book 44
References 45
vi CONTENTS
2 MEMS materials and fabrication techniques 51
2.1 Metals 51
2.1.1 Evaporation 51
2.1.2 Sputtering 53
2.2 Semiconductors 54
2.2.1 Electrical and chemical properties 54
2.2.2 Growth and deposition 57
2.3 Thin films for MEMS and their deposition techniques 61
2.3.1 Oxide film formation by thermal oxidation 61
2.3.2 Deposition of silicon dioxide and silicon nitride 62
2.3.3 Polysilicon film deposition 64
2.3.4 Ferroelectric thin films 64
2.4 Materials for polymer MEMS 67
2.4.1 Classification of polymers 67
2.4.2 UV radiation curing 74
2.4.3 SU-8 for polymer MEMS 80
2.5 Bulk micromachining for silicon-based MEMS 84
2.5.1 Isotropic and orientation-dependent wet etching 84
2.5.2 Dry etching 88
2.5.3 Buried oxide process 88
2.5.4 Silicon fusion bonding 89
2.5.5 Anodic bonding 90
2.6 Silicon surface micromachining 91
2.6.1 Sacrificial layer technology 91
2.6.2 Material systems in sacrificial layer technology 92
2.6.3 Surface micromachining using plasma etching 93
2.6.4 Combined integrated-circuit technology
and anisotropic wet etching 94
2.7 Microstereolithography for polymer MEMS 94
2.7.1 Scanning method 95
2.7.2 Two-photon microstereolithography 96
2.7.3 Surface micromachining of polymer MEMS 97
2.7.4 Projection method 97
2.7.5 Polymeric MEMS architecture with silicon, metal
and ceramics 102
2.7.6 Microstereolithography integrated with thick-film
lithography 105
2.8 Conclusions 105
References 105
3 RF MEMS switches and micro relays 109
3.1 Introduction 109
3.2 Switch parameters 111
3.3 Basics of switching 115
3.3.1 Mechanical switches 116
3.3.2 Electronic switches 117
CONTENTS vii
3.4 Switches for RF and microwave applications 117
3.4.1 Mechanical RF switches 118
3.4.2 PIN diode RF switches 119
3.4.3 Metal oxide semiconductor field effect transistors
and monolithic microwave integrated circuits 123
3.4.4 RF MEMS switches 124
3.4.5 Integration and biasing issues for RF switches 125
3.5 Actuation mechanisms for MEMS devices 127
3.5.1 Electrostatic switching 128
3.5.2 Approaches for low-actuation-voltage switches 141
3.5.3 Mercury contact switches 146
3.5.4 Magnetic switching 148
3.5.5 Electromagnetic switching 148
3.5.6 Thermal switching 151
3.6 Bistable micro relays and microactuators 152
3.6.1 Magnetic actuation in micro relays 152
3.6.2 Relay contact force and materials 156
3.7 Dynamics of the switch operation 157
3.7.1 Switching time and dynamic response 158
3.7.2 Threshold voltage 160
3.8 MEMS switch design, modeling and evaluation 162
3.8.1 Electromechanical finite element analysis 163
3.8.2 RF design 165
3.9 MEMS switch design considerations 174
3.10 Conclusions 175
References 178
4 MEMS inductors and capacitors 183
4.1 Introduction 183
4.2 MEMS/micromachined passive elements: pros and cons 184
4.3 MEMS inductors 184
4.3.1 Self-inductance and mutual inductance 185
4.3.2 Micromachined inductors 188
4.3.3 Effect of inductor layout 194
4.3.4 Reduction of stray capacitance of planar
inductors 198
4.3.5 Approaches for improving the quality factor 200
4.3.6 Folded inductors 211
4.3.7 Modeling and design issues of planar inductors 212
4.3.8 Variable inductors 215
4.3.9 Polymer-based inductors 215
4.4 MEMS capacitors 215
4.4.1 MEMS gap-tuning capacitors 217
4.4.2 MEMS area-tuning capacitors 224
4.4.3 Dielectric tunable capacitors 228
4.5 Conclusions 229
References 235
viii CONTENTS
5 Micromachined RF filters 241
5.1 Introduction 241
5.2 Modeling of mechanical filters 244
5.2.1 Modeling of resonators 244
5.2.2 Mechanical coupling components 251
5.2.3 General considerations for mechanical filters 257
5.3 Micromechanical filters 258
5.3.1 Electrostatic comb drive 258
5.3.2 Micromechanical filters using comb drives 260
5.3.3 Micromechanical filters using electrostatic coupled
beam structures 265
5.4 Surface acoustic wave filters 268
5.4.1 Basics of surface acoustic wave filter operation 269
5.4.2 Wave propagation in piezoelectric substrates 270
5.4.3 Design of interdigital transducers 271
5.4.4 Single-phase unidirectional transducers 274
5.4.5 Surface acoustic wave devices: capabilities, limitations
and applications 275
5.5 Bulk acoustic wave filters 276
5.6 Micromachined filters for millimeter wave frequencies 278
5.7 Summary 282
References 283
6 Micromachined phase shifters 285
6.1 Introduction 285
6.2 Types of phase shifters and their limitations 286
6.2.1 Ferrite phase shifters 287
6.2.2 Semiconductor phase shifters 287
6.2.3 Ferroelectric thin-film phase shifters 288
6.2.4 Limitations of phase shifters 288
6.3 MEMS phase shifters 289
6.3.1 Switched delay line phase shifters 289
6.3.2 Distributed MEMS phase shifters 289
6.3.3 Polymer-based phase shifters 296
6.4 Ferroelectric phase shifters 298
6.4.1 Distributed parallel plate capacitors 299
6.4.2 Bilateral interdigital phase shifters 301
6.4.3 Interdigital capacitor phase shifters 304
6.5 Applications 305
6.6 Conclusions 305
References 306
7 Micromachined transmission lines and components 309
7.1 Introduction 309
7.2 Micromachined transmission lines 310
7.2.1 Losses in transmission lines 311
7.2.2 Co-planar transmission lines 313
CONTENTS ix
7.2.3 Microshield and membrane-supported
transmission lines 316
7.2.4 Microshield circuit components 321
7.2.5 Micromachined waveguide components 324
7.2.6 Micromachined directional couplers 327
7.2.7 Micromachined mixer 327
7.2.8 Passive components: resonators and filters 330
7.2.9 Micromachined antennae 332
7.3 Design, fabrication and measurement 334
7.3.1 Design 335
7.3.2 Fabrication 335
7.3.3 Evaluation 335
7.4 Conclusions 337
References 338
8 Micromachined antennae 343
8.1 Introduction 343
8.2 Overview of microstrip antennae 344
8.2.1 Basic characteristics of microstripeantennae 344
8.2.2 Design parameters of microstrip antennae 347
8 ..

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88888	rf币 +1	积极参与论坛交流，欢迎继续参与本贴交流！	2012-05-17
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redmoon	rf币 +1	h很不错	2011-06-11
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