[仿真]i iXPROVED MMIC DESIGN SYSTEM COMPOSED OF AN ELECTRON BW.1 DIRECT DRAWING,

An improved design system was $h-5PwHp  
introduced to develop not only new MMICs r='"X#CmV/  
and their element devices but also their dZ7+Iw;m  
accurate simulation models which is ^.J F?2T/  
composed of EB direct drawing, microwave dSb|hA}@  
simulation and on-wafer measurement QMfa~TH#p  
subsystems connected through the LAN. Kj_hCSvf3e  
Successful preliminary applications of D`lTP(] y  
this system are demonstrated for an "oYyeT ,?  
improved T-shaped 0.1 um length gate ~o+HAc`=v  
formation and an amplifier .. NVMhbpX6  
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