[仿真]Monte Carlo simulation of a microwave plasma in hydrogen

Abstract. Monte Carlo simulations of a microwave plasma (frequency 2.45 GHz, pressure <{E;s)hD?  
2–15 kPa) in hydrogen are reported. The simulation follows the chaotic motion of a number g})6V  
of electrons and ions under the influence of outer (microwave) and inner (other charge 5/t
j  
carriers) electric fields. The charge carriers collide with the neutral gas particles either in an >_-!zjO8u  
elastic or inelastic manner. In such a simulation only basic physical laws have to be applied. IhUW=1&J  
The simulations produce reaction rates for the different reaction paths of main $pjf#P8U  
importance in a straightforward way. The electron energy distribution function (EEDF), `0Yt1Z&
 
which is simply a time average of the actual energies of the electrons, deviates from the G4O,^ v;Q  
Maxwell distribution by a depletion at low and high electron energies. Correction functions .F4oo=
 
are derived which allow EEDFs under widely different plasma conditions to be calculated z<n"{%  
from the respective Maxwell distributions. Finally the results are a .. {a]pF.^kf  
$4DFgvy$  

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谢谢楼主~~~