[射频]RF MEMS devices

[table=100%][tr][td]RF MEMS devices !TcJ)0   
Mansour, R.R.   Bakri-Kassem, M.   Daneshmand, M.   Messiha, N.   &6k3*dq  
Univ. of Waterloo, Ont., Canada Y|/ 8up  
This paper appears in: MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on H0cA6I  
Publication Date: 20-23 July 2003 [.}oyz;}N  
On page(s): 103 - 107 ;O#>Y  
Number of Pages: xii+437 rW#T vUn  
ISSN: @KUWxFak  
ISBN: 0-7695-1947-4 /<BI46B\  
INSPEC Accession Number:7937863 :2)/FPL6  
Current Version Published: 2003-08-18 #,v{Ihn  
[/td][/tr][tr][td][/td][/tr][tr][td][/td][/tr][tr][td][/td][/tr][tr][td]Abstract Ht&YC<X  
This paper addresses the use of RF MEMS devices in wireless and satellite communication systems. Novel configurations are presented for MEMS variable capacitors, MEMS tunable inductors and RF MEMS multiport switches. The tuning range of the variable capacitor was measured and found to be 280%, which far exceeds that of the traditional parallel plate MEMS variable capacitors. The MEMS tunable inductor is realized using MEMS .. |+"(L#wk  
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