[数值]Efficient Capacitance Calculations for Three-Dimensional Multiconductor Systems

Abstract—The design and packaging of integrated circuits requires bq5ySy{8  
the calculation of capacitances for three-dimensional conductors L[PqEN\i  
located on parallel planes. An integral-equation (IE) computer- ]2L11"erP  
solution technique is presented, which provides accurate L+ew/I>:  
results. The solution tectilque minimizes computer storage requirements ]*]*O|w  
while maintaining calc .. Z:^<NdKe  
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