[射频]RF MEMS Impedance Tuners for 6–24 GHz Applications

ABSTRACT: RF MEMS tuners with wide impedance coverage have been developed for 6– Qo>VN`v  
24 GHz noise parameter and load-pull measurement systems. The tuners are based on triple-, [bd fp a  
double-, and single-stub topologies loaded with switched MEMS capacitors. Several X p4x:N  
designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024– H-GlCVq~  
8192 (2e10–2e13) different impedances. The measured impedance coverage agrees well with IKhpe5}  
simulations and it is the widest ever measured impedance coverage from any planar tuner './j<2|;U  
to-date. V V C 2007 Wiley Periodicals, Inc. Int J RF and Microwave CAE 17: 265–278, 2007. UxZT&x3=)}  
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Keywords: RF MEMS; impedance tuner; .. Ur`Ri?
  
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Re:RF MEMS Impedance Tuners for 6–24 GHz Applications

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