[资料]射频MEMS器件的晶圆级封装(博士论文PDF下载)

[post]A low-cost, low-temperature packaging concept is proposed for localized sealing and control of the ambient of a device cavity appropriate for Radio-Frequency (RF) MicroElectro-Mechanical (MEMS) devices, such as resonators and switches. These devices require application speciÖc packaging to facilitate their integration, provide protection from the environment, and control interactions with other circuitry. In order to integrate these devices into standard integrated circuit (IC) process áows and minimize damage due to post-fabrication steps, packaging is performed at the wafer level.

In this work Indium and Silver are used to seal a monolithic localized hermetic package. The cavity protecting the device is formed using standard lithography-based processing techniques. Metal walls are built up from the substrate and encapsulated by a glass or silicon lid to create a monolithic micro-hermetic package surrounding a predefined RF microsystem. The bond for the seal is then formed by rapid alloying of Indium and Silver using a temperature greater than that of the melting point of Indium. This ensures that the seal formed can subsequently function at temperatures higher than the melting temperature of pure Indium. This method offers a low-temperature bonding technique with thermal robustness suitable for wafer-level
process integration. The ultimate goal is to create a seal in a vacuum environment. In this dissertation, design trade-o§s made in wafer-level packaging are explained using thermo-mechanical stress and electrical performance simulations. Prototype passive microwave circuits are packaged using the developed packaging process and the performance of the fabricated circuits before and after packaging is analyzed. The effect of the package on coplanar waveguide structures are characterized by measuring scattering parameters and models are developed as a design tool for wafer-level package integration. ..

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